Dynamic Q-enhancement in aluminum nitride contour-mode resonators
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DOI: 10.1063/1.5115437
Abstract: In this letter, we discuss a dynamic quality factor (Q)-enhancement technique for aluminum nitride (AlN) contour-mode resonators. This technique is implemented by applying an external voltage source that has a specific frequency-dependent phase relationship with… read more here.
Keywords: aluminum nitride; enhancement; mode resonators; resonator ... See more keywords