Tracking Control of a Monolithic Piezoelectric Nanopositioning Stage using an Integrated Sensor.
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DOI: 10.1016/j.ifacol.2017.08.2455
Abstract: Abstract This article describes a method for tracking control of monolithic nanopositioning systems using integrated piezoelectric sensors. The monolithic nanopositioner is constructed from a single sheet of piezoelectric material where a set of flexures are… read more here.
Keywords: using integrated; control monolithic; piezoelectric nanopositioning; control ... See more keywords