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Controlled cobalt recess for advanced interconnect metallization

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0 Published in 2019 at "Microelectronic Engineering"

DOI: 10.1016/j.mee.2019.111131

Abstract: Abstract We have developed a wet chemical etch process for the controlled recess of cobalt metal based on ‘digital etching’. Digital etching is a cyclic process wherein each process cycle comprises an oxidation and oxide… read more here.

Keywords: controlled cobalt; advanced interconnect; cobalt; recess ... See more keywords

Controlled Cobalt-Mediated Free-Radical Co- and Terpolymerization of Carbon Monoxide.

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1 Published in 2022 at "Journal of the American Chemical Society"

DOI: 10.1021/jacs.2c07200

Abstract: While controlled free-radical polymerizations are established for a vast range of vinyl monomers, they have not been reported for carbon monoxide, although it is a unique monomer that forms in-chain keto groups which can promote,… read more here.

Keywords: carbon; controlled cobalt; cobalt mediated; free radical ... See more keywords

Ligand-Controlled Cobalt-Catalyzed Regio-, Enantio-, and Diastereoselective Oxyheterocyclic Alkene Hydroalkylation.

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0 Published in 2024 at "Journal of the American Chemical Society"

DOI: 10.1021/jacs.3c12881

Abstract: Metal-hydride-catalyzed alkene hydroalkylation has been developed as an efficient method for C(sp3)-C(sp3) coupling with broad substrate availability and high functional group compatibility. However, auxiliary groups, a conjugated group or a chelation-directing group, are commonly required… read more here.

Keywords: catalyzed regio; ligand controlled; regio enantio; alkene hydroalkylation ... See more keywords