Controlled cobalt recess for advanced interconnect metallization
Sign Up to like & getrecommendations! Published in 2019 at "Microelectronic Engineering"
DOI: 10.1016/j.mee.2019.111131
Abstract: Abstract We have developed a wet chemical etch process for the controlled recess of cobalt metal based on ‘digital etching’. Digital etching is a cyclic process wherein each process cycle comprises an oxidation and oxide… read more here.
Keywords: controlled cobalt; advanced interconnect; cobalt; recess ... See more keywords
Controlled Cobalt-Mediated Free-Radical Co- and Terpolymerization of Carbon Monoxide.
Sign Up to like & getrecommendations! Published in 2022 at "Journal of the American Chemical Society"
DOI: 10.1021/jacs.2c07200
Abstract: While controlled free-radical polymerizations are established for a vast range of vinyl monomers, they have not been reported for carbon monoxide, although it is a unique monomer that forms in-chain keto groups which can promote,… read more here.
Keywords: carbon; controlled cobalt; cobalt mediated; free radical ... See more keywords