3D OPC method for controlling the morphology of micro structures in laser direct writing.
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DOI: 10.1364/oe.479407
Abstract: A 3D optical proximity correction (OPC) method for controlling the morphology of micro-structures in laser direct writing is proposed, considering both the optical proximity effect and nonlinear response of a thick-film photoresist. This method can… read more here.
Keywords: opc method; micro structures; structures laser; controlling morphology ... See more keywords