Controlling the parameters of focused ion beam for ultra-precise fabrication of nanostructures.
Sign Up to like & getrecommendations! Published in 2022 at "Ultramicroscopy"
DOI: 10.1016/j.ultramic.2022.113481
Abstract: At present, the focused ion beam method is an effective technique for nanoscale profiling of a solid surface and prototyping of micro- and nanoscale structures. The article reveals the results of experimental studies on improving… read more here.
Keywords: beam; nanoscale structures; ion beam; focused ion ... See more keywords