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Published in 2017 at "Procedia Manufacturing"
DOI: 10.1016/j.promfg.2017.07.049
Abstract: Abstract Rotary ultrasonic machining (RUM), a hybrid nontraditional process technology combining ultrasonic machining and grinding, has been proven to be a promising method for hole making of CFRP. Due to its advanced capabilities, RUM has…
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Keywords:
surface;
ultrasonic surface;
surface machining;
conventional surface ... See more keywords
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Published in 2021 at "Journal of Micromechanics and Microengineering"
DOI: 10.1088/1361-6439/abfa7f
Abstract: Micro electromechanical system (MEMS) based optical phased array (OPA) technology generally demands narrow and tightly spaced suspended microstructures with high-aspect-ratio in the lateral dimensions. This paper presents an one dimensional OPA system which is fabricated…
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Keywords:
array;
surface micromachining;
optical phased;
phased array ... See more keywords