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Published in 2020 at "Journal of Intelligent Manufacturing"
DOI: 10.1007/s10845-018-1445-4
Abstract: This paper presents a method for the monitoring and prediction of the electrolyte quality during the process of copper electroplating. This is important in industry, as any deviation in the solution quality leads to a…
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Keywords:
copper electroplating;
monitoring prediction;
quality;
solution quality ... See more keywords
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Published in 2022 at "RSC Advances"
DOI: 10.1039/d2ra02274e
Abstract: Microvia filling by copper electroplating was performed using plating solution with 1-(4-hydroxyphenyl)-2H-tetrazole-5-thione (HPTT) as the leveler. Galvanostatic Measurements (GMs), Linear Sweep Voltammetry (LSV) and Electrochemical Impedance Spectroscopy (EIS) tests were carried out to investigate the…
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Keywords:
copper;
hptt;
tetrazole thione;
copper electroplating ... See more keywords