Correlation of acetylene plasma discharge environment and the optical and electronic properties of the hydrogenated amorphous carbon films
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DOI: 10.1016/j.diamond.2019.04.021
Abstract: Abstract Thin films from polymeric and graphitic hydrogenated amorphous carbon (a-C:H) were deposited over a glass substrate from acetylene (C2H2) plasma by using a conventional plasma enhanced chemical vapor deposition (PECVD). Radio frequency capacitively coupled… read more here.
Keywords: amorphous carbon; acetylene plasma; correlation acetylene; discharge ... See more keywords