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Published in 2025 at "Small"
DOI: 10.1002/smll.202508888
Abstract: Abstract Layers of HfO2 and (Hf,Zr)O2 crystalline nano‐particles are synthesized via direct liquid injection atomic layer deposition, and a comprehensive set of structural, chemical, and electrical characterizations is employed to elucidate their phase composition and…
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Keywords:
spectroscopy;
correlations oxygen;
phase correlations;
electronic structural ... See more keywords