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Published in 2017 at "Microscopy and Microanalysis"
DOI: 10.1017/s1431927617003488
Abstract: Recent developments in SEM column design have led to the ability to produce sub-nm spot sizes even at high probe currents [1], thus pushing the imaging and analytical techniques available in the SEM to approach…
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Keywords:
analysis;
advancing correlative;
correlative stem;
methods sem ... See more keywords