Young's modulus and corresponding orientation in β-Ga2O3 thin films resolved by nanomechanical resonators
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DOI: 10.1063/5.0050421
Abstract: We report on the non-destructive measurement of Young’s modulus of thin-film single crystal beta gallium oxide (β-Ga2O3) out of its nanoscale mechanical structures by measuring their fundamental mode resonance frequencies. From the measurements, we extract… read more here.
Keywords: corresponding orientation; ga2o3; young modulus; orientation ga2o3 ... See more keywords