Electrodissolution-coupled hafnium alkoxide synthesis with high environmental and economic benefits.
Sign Up to like & getrecommendations! Published in 2022 at "ChemSusChem"
DOI: 10.1002/cssc.202200474
Abstract: The conventional thermal method of preparing hafnium alkoxides [Hf(OR) 4 , R is alkyl]-excellent precursors for gate-dielectric HfO 2 on semiconductors-was severely hindered by its unsatisfactory environment and economy burdens. Herein, we proposed a promising… read more here.
Keywords: coupled hafnium; electrodissolution; synthesis; electrodissolution coupled ... See more keywords