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Published in 2017 at "Procedia Manufacturing"
DOI: 10.1016/j.promfg.2017.07.015
Abstract: Abstract This paper extends the application of a novel wavelet-based periodic error compensation algorithm in fiber-coupled heterodyne interferometry. In this case, the amplitudes of periodic error may be fluctuating and traditional digital algorithms are not…
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Keywords:
error;
error compensation;
periodic error;
heterodyne interferometry ... See more keywords