Fabrication and Characterization of a Wideband Low-Frequency CMUT Array for Air-Coupled Imaging
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DOI: 10.1109/jsen.2020.3007068
Abstract: The capacitive micro-machined ultrasonic transducer (CMUT) has a good acoustic matching with air. In this paper, a 16-element CMUT array for airborne application is designed and fabricated by SOI wafer bonding process. All the CMUT… read more here.
Keywords: cmut; cmut array; air; coupled imaging ... See more keywords