Structural, electrical and gas-sensitive properties of Cr2O3 thin films
Sign Up to like & getrecommendations! Published in 2021 at "Superlattices and Microstructures"
DOI: 10.1016/j.spmi.2021.106835
Abstract: Abstract Cr2O3 thin films were synthesized by RF magnetron sputtering of a Cr target in an oxygen-argon plasma. The effect of annealing temperature on the structural, electrical, and gas-sensitive properties of the Cr2O3 thin films… read more here.
Keywords: thin films; cr2o3 thin; annealing temperature; structural electrical ... See more keywords