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Published in 2020 at "RSC Advances"
DOI: 10.1039/d0ra03784b
Abstract: The in situ growth of nanowires (NWs) into nano-/microelectromechanical systems (NEMS/MEMS) by solution processing is attractive for its relative simplicity and economic value. We present innovative, versatile microfabrication that produces multiple, heterogeneous semiconductor NWs. A…
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Keywords:
micro nanofluidic;
crack photolithography;
photolithography based;
heterogeneous semiconductor ... See more keywords