Influence of polycrystalline material on crater shape optimization and roughness using low-power/low-pressure direct-current glow discharge mass spectrometry
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DOI: 10.1039/d0ja00055h
Abstract: Depth profiling is an attractive approach for analysis of non-homogeneous samples and layered materials. This application requires an optimum sputtered crater profile, which means a flat crater bottom with steep walls and a low roughness.… read more here.
Keywords: crater; crater shape; discharge; roughness ... See more keywords