LAUSR

CrB2 diffusion barriers for Mo/Si multilayer structures

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1 Published in 2019 at "Materials Research Express"

DOI: 10.1088/2053-1591/ab02af

Abstract: Properties of CrB2 thin diffusion layers sputtered in Mo/Si multilayer structures and their effect on the x-ray/EUV reflectance are reported. A special attention is paid to determine a critical thickness t* for barrier layers where… read more here.

Keywords: crb2 diffusion; multilayer structures; diffusion; diffusion barriers ... See more keywords