A Novel Crossbeam Structure with Graphene Sensing Element for N/MEMS Mechanical Sensors
Sign Up to like & getrecommendations! Published in 2022 at "Nanomaterials"
DOI: 10.3390/nano12122101
Abstract: A graphene membrane acts as a highly sensitive element in a nano/micro–electro–mechanical system (N/MEMS) due to its unique physical and chemical properties. Here, a novel crossbeam structure with a graphene varistor protected by Si3N4 is… read more here.
Keywords: graphene; mems mechanical; crossbeam; crossbeam structure ... See more keywords