Ductile machining of optical micro-structures on single crystal germanium by elliptical vibration assisted sculpturing.
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DOI: 10.1364/oe.461691
Abstract: Microstructure surfaces are widely and deeply applied in optical fields to decrease the volume of an optical system and realize sophisticated optical requirements. This paper studies the machining of optical micro-structures with micro-scale height on… read more here.
Keywords: single crystal; elliptical vibration; micro structures; optical micro ... See more keywords