Optimizing the Crystallinity of a ZrO2 Thin Film Insulator for InGaZnO‐Based Metal–Insulator–Semiconductor Capacitors
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DOI: 10.1002/admi.202300883
Abstract: The utilization of a zirconium oxide (ZrO2) thin film as the insulator in a metal–insulator–semiconductor (MIS) capacitor to enhance the characteristics of thin‐film transistors is investigated. Although the high crystallinity of ZrO2 is favorable to… read more here.
Keywords: zro2 thin; zro2; crystallinity zro2; metal insulator ... See more keywords