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Cubic AlN with high thermal stabilities in TiN/AlN multilayers

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1 Published in 2019 at "Surface and Coatings Technology"

DOI: 10.1016/j.surfcoat.2019.01.031

Abstract: Abstract In this paper, the thermal study of a TiN/AlN superlattice was reported. The TiN/AlN superlattice was prepared by reactive magnetron sputtering. And the thermal stability was evaluated by X-ray diffraction measurement and TEM observation… read more here.

Keywords: high thermal; aln high; cubic aln; aln superlattice ... See more keywords