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Published in 2019 at "Microsystem Technologies"
DOI: 10.1007/s00542-018-3927-x
Abstract: In this study, the ultraviolet (UV) curing and air pressure imprinting methods are proposed for the fabrication of a light-intensity-enhancement component. The air-pressing process provides a uniform embossing pressure, and the UV curing module enables…
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Keywords:
system;
ultraviolet curing;
air;
pressure ... See more keywords