Thickness distribution of sputtered films on curved substrates for adjustable x-ray optics
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DOI: 10.1117/1.jatis.5.2.021005
Abstract: Abstract. Piezoelectric adjustable x-ray optics use magnetron sputtered thin film coatings on both sides of a thin curved glass substrate. To produce an optic suitable for a mission requiring high-angular resolution like “Lynx,” the integrated… read more here.
Keywords: ray optics; curved substrates; ray; thickness distribution ... See more keywords