Finding the optimum design of the planar cutoff probe through a computational study
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DOI: 10.1063/5.0033222
Abstract: A new plasma diagnostic tool called the planar cutoff probe (PCP), recently developed by Kim et al. [Plasma Sources Sci. Technol. 28, 015004(2019)], can be embedded into a chamber wall or wafer chuck electrode for… read more here.
Keywords: cutoff probe; planar cutoff; design; probe ... See more keywords
Analysis of the transmission spectrum of the microwave cutoff probe influenced by the sheath around the probe
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DOI: 10.1063/5.0145958
Abstract: We investigated the effect of the sheath around the probe tips on the transmission spectrum of a cutoff probe using an electromagnetic simulation and a circuit model. Our results show that the width of the… read more here.
Keywords: transmission spectrum; cutoff probe; sheath; probe ... See more keywords