A review on laser drilling and cutting of silicon
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DOI: 10.1016/j.jeurceramsoc.2021.04.019
Abstract: Abstract Silicon is the most widely used material in numerous fields. Traditional mechanical machining methods have been unable to meet the higher requirements of processing quality. Laser machining is especially suitable for processing hard and… read more here.
Keywords: drilling cutting; laser drilling; cutting silicon; laser ... See more keywords