Nanoscale tilt measurement using a cyclic interferometer with polarization phase stepping and multiple reflections.
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DOI: 10.1364/ao.57.000b52
Abstract: High-accuracy tilt or roll angle measurement is required for a variety of engineering and scientific applications. A cyclic interferometer with multiple reflections has been developed to measure small tilt angles. To accomplish this task, a… read more here.
Keywords: polarization phase; phase; cyclic interferometer; measurement ... See more keywords