Deep reactive ion etching of cylindrical nanopores in silicon for photonic crystals
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DOI: 10.1088/1361-6528/acc034
Abstract: Periodic arrays of deep nanopores etched in silicon by deep reactive ion etching are desirable structures for photonic crystals and other nanostructures for silicon nanophotonics. Previous studies focused on realizing as deep as possible nanopores… read more here.
Keywords: ion etching; reactive ion; photonic crystals; deep reactive ... See more keywords