Development of carbon transport and modeling in Czochralski silicon crystal growth
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DOI: 10.1002/crat.201600221
Abstract: In Czochralski silicon (CZ-Si) crystal growth, species generated from high temperature reactions and transported by Si melt and argon (Ar) gas strongly affect the purity and quality of the grown crystals. The reduction of carbon… read more here.
Keywords: carbon; silicon crystal; transport; gas ... See more keywords
Growth and ripening of oxygen precipitation in neutron-irradiated Czochralski silicon
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DOI: 10.1016/j.mssp.2017.11.010
Abstract: Abstract The effects of the vacancy-related defects introduced by neutron irradiation on oxygen precipitation in Czochralski silicon have been elaborately investigated. It is found that the vacancy-related defects significantly enhance the nucleation of oxygen precipitates… read more here.
Keywords: oxygen; oxygen precipitates; czochralski silicon; oxygen precipitation ... See more keywords