Design and fabrication of a D33-mode piezoelectric micro-accelerometer
Sign Up to like & getrecommendations! Published in 2019 at "Microsystem Technologies"
DOI: 10.1007/s00542-019-04495-z
Abstract: In this paper, a D33-mode piezoelectric micro-accelerometer with Pb1.1(Zr0.52Ti0.48)O3(PZT) thin film is designed, fabricated and tested. Both the polarization and deformation directions of the piezoelectric thin film are horizontal in this structure. With the high… read more here.
Keywords: d33 mode; accelerometer; micro; mode piezoelectric ... See more keywords
Design Flexural Piezoelectric Acoustic Transducers Array based d33 Mode Polarization
Sign Up to like & getrecommendations! Published in 2018 at "Indonesian Journal of Electrical Engineering and Computer Science"
DOI: 10.11591/ijeecs.v10.i1.pp59-65
Abstract: Piezoelectric Acoustic Transducer (PAT) is a transducers used in many application such as medical diagnostic, medical ultrasonic imaging and underwater acoustic applications. Latest research, PAT were investigated in marine application and underwater acoustic imaging. Conventional… read more here.
Keywords: based d33; acoustic transducers; sensitivity; d33 mode ... See more keywords