Technology Research on the Preparation of DBR Semiconductor Lasers by Electron Beam Lithography
Sign Up to like & getrecommendations! Published in 2023 at "Integrated Ferroelectrics"
DOI: 10.1080/10584587.2023.2191554
Abstract: Abstract In order to obtain the high performance output of DBR semiconductor laser, the grating pattern is photolithographed by electron beam exposure technique, and the grating structure is fabricated by combining inductively coupled plasma etching… read more here.
Keywords: semiconductor lasers; dbr semiconductor; semiconductor; electron beam ... See more keywords
High-order DBR semiconductor lasers: effect of grating parameters on grating performance: publisher's note.
Sign Up to like & getrecommendations! Published in 2020 at "Applied optics"
DOI: 10.1364/ao.411707
Abstract: This publisher's note amends the author listing in Appl. Opt.59, 8789 (2020)APOPAI0003-693510.1364/AO.402699. read more here.
Keywords: dbr semiconductor; order dbr; publisher; publisher note ... See more keywords