Atmospheric pressure plasma of C2F6/N2 for the decomposition of C2F6 in a dielectric barrier discharge
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DOI: 10.1016/j.jiec.2017.08.039
Abstract: Abstract Effects of operating parameters on the decomposition of C2F6 in a mixture with N2 were investigated in an atmospheric pressure plasma. A stretching of the Lissajous pattern and increase in intensity of voltage/current were… read more here.
Keywords: pressure plasma; decomposition c2f6; atmospheric pressure; c2f6 ... See more keywords