Design and analysis of mode-matched decoupled mass MEMS gyroscope with improved thermal stability
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DOI: 10.1088/1361-6501/ad4bfd
Abstract: This paper presents an efficient design approach for microelectromechanical systems (MEMS) gyroscope considering the design constraint of MEMSCAP’s Silicon-on-Insulator Multi-User MEMS Processes (SOIMUMPs). A design for a decoupled mass MEMS resonant gyroscope with tuning electrodes… read more here.
Keywords: decoupled mass; mode matched; mems gyroscope; mass mems ... See more keywords