Deep etched and released microstructures in Zerodur in a fluorine-based plasma
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DOI: 10.1016/j.mee.2018.07.004
Abstract: Abstract In this paper, we demonstrate the dry-etch release of free-standing mechanical elements with a high aspect ratio from a Zerodur wafer. Our previous research was focussed on deep plasma etching of Zerodur and the… read more here.
Keywords: deep etched; etched released; fluorine based; process ... See more keywords