Investigation of etching method for fabricating deep through holes on ultra-high resistivity silicon*
Sign Up to like & getrecommendations! Published in 2017 at "Journal of Semiconductors"
DOI: 10.1088/1674-4926/38/5/056002
Abstract: In this paper, the etching characteristics of the ultra-high resistivity silicon (UHRS) by using the Bosch process were investigated. The experimental results indicated that the sulfur hexafluoride flux, the temperature of the substrate, the platen… read more here.
Keywords: deep holes; high resistivity; resistivity silicon; ultra high ... See more keywords
Deep Holes of Projective Reed-Solomon Codes
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DOI: 10.1109/tit.2019.2940962
Abstract: Projective Reed-Solomon (PRS) codes are Reed-Solomon codes of the maximum possible length $q+1$ . The classification of deep holes –received words with maximum possible error distance– for PRS codes is an important and difficult problem.… read more here.
Keywords: deep holes; solomon codes; reed solomon; prs codes ... See more keywords
Drilling Strategies to Improve the Geometrical and Dimensional Accuracy of Deep through Holes Made in PA6 Alloy
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DOI: 10.3390/ma16010110
Abstract: This article shows how different drilling strategies may affect the geometrical and dimensional accuracy of deep through holes. The tests were conducted on a three-axis direct-drive turning center. The holes were drilled in cylindrical PA6… read more here.
Keywords: dimensional accuracy; geometrical dimensional; accuracy deep; deep holes ... See more keywords