Junction-based deep mesa termination for multi-kilovolt vertical β -Ga2O3 power devices
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DOI: 10.1063/5.0251699
Abstract: Deep mesa is an effective edge termination widely deployed in high-voltage power devices. However, its effectiveness requires the minimal distance between mesa and electrode edge and is susceptible to charges in the dielectric passivation, posing… read more here.
Keywords: deep mesa; mesa termination; termination; mesa ... See more keywords