Phase defect characterization using generative adversarial networks for extreme ultraviolet lithography.
Sign Up to like & getrecommendations! Published in 2023 at "Applied optics"
DOI: 10.1364/ao.480356
Abstract: The multilayer defects of mask blanks in extreme ultraviolet (EUV) lithography may cause severe reflectivity deformation and phase shift. The profile information of a multilayer defect is the key factor for mask defect compensation or… read more here.
Keywords: lithography; defect characterization; extreme ultraviolet; adversarial networks ... See more keywords
DEFECT CHARACTERIZATION OF METALLIC MATERIALS USING SELF-PARAMETERIZED DENSITY-BASED CLUSTERING AND COMPUTATIONAL INTELLIGENCE TECHNIQUES
Sign Up to like & getrecommendations! Published in 2024 at "Materiali in tehnologije"
DOI: 10.17222/mit.2023.982
Abstract: Rapid growth of manufacturing industries is propelled by transformative technologies such as machine intelligence, autonomous computing and non-destructive testing (NDT). During the manufacturing of wrought products, there is no guarantee that the final product is… read more here.
Keywords: defect characterization; parameterized density; based clustering; density based ... See more keywords
Defect Characterization in Thermoelectric Zn-Sb Systems by Positron Annihilation
Sign Up to like & getrecommendations! Published in 2017 at "Defect and Diffusion Forum"
DOI: 10.4028/www.scientific.net/ddf.373.245
Abstract: Positron lifetimes and momentum distributions of annihilating electron-positron pairs have been calculated for vacancies in ZnSb and Zn4Sb3. The calculated positron lifetimes for bulk ZnSb and Zn4Sb3 are 203 ps and 208 ps, and for… read more here.
Keywords: znsb zn4sb3; defect characterization; characterization thermoelectric; znsb ... See more keywords