Atomic hydrogen induced defect kinetics in amorphous silicon
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DOI: 10.1116/1.4987152
Abstract: Near-infrared evanescent-wave cavity ring-down spectroscopy (CRDS) has been applied to study the defect evolution in an amorphous silicon (a-Si:H) thin film subjected to a directed beam of atomic H with a flux of (0.4–2) ×… read more here.
Keywords: atomic hydrogen; defect kinetics; induced defect; kinetics amorphous ... See more keywords