Automated Detection and Classification of Defective and Abnormal Dies in Wafer Images
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DOI: 10.3390/app10103423
Abstract: This article presents an automated vision-based algorithm for the die-scale inspection of wafer images captured using scanning acoustic tomography (SAT). This algorithm can find defective and abnormal die-scale patterns, and produce a wafer map to… read more here.
Keywords: die; detection; wafer images; template ... See more keywords