Characterization of morphological defects related to micropipes in 4H-SiC thick homoepitaxial layers
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DOI: 10.1016/j.jcrysgro.2021.126182
Abstract: Abstract A new type of morphological defects related to substrate micropipe is observed in 4H-SiC thick homoepitaxial layers. The structure and formation mechanism are investigated by optical microscopy, laser microscopy, scanning electron microscopy, micro-Raman spectroscopy,… read more here.
Keywords: defects related; microscopy; spectroscopy; morphological defects ... See more keywords