Lithographically Defined Cross-Linkable Top Coats for Nanomanufacturing with High-χ Block Copolymers.
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DOI: 10.1021/acsami.1c00694
Abstract: The directed self-assembly (DSA) of block copolymers (BCPs) is a powerful method for the manufacture of high-resolution features. Critical issues remain to be addressed for successful implementation of DSA, such as dewetting and controlled orientation… read more here.
Keywords: lithographically defined; defined cross; cross; bcp ... See more keywords