Estimating residual stresses of silicon wafer from measured full-field deflection distribution
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DOI: 10.1016/j.optlaseng.2021.106781
Abstract: Abstract This paper proposes an experimental-numerical hybrid method for estimating the residual stresses in a silicon wafer from the full-field deflection measurement. In the proposed method, the measured deflection distribution is approximated using regularized least-squares… read more here.
Keywords: deflection; silicon wafer; deflection distribution; method ... See more keywords