Study on Static Deflection Model of MEMS Capacitive Microwave Power Sensors
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DOI: 10.23919/cje.2023.00.087
Abstract: — In this paper, a static deflection model of MEMS cantilever beam is proposed, which can better study the force deformation of micro-electro-mechanical system (MEMS) cantilever beam and the output characteristics of capacitive microwave power… read more here.
Keywords: deflection model; microwave power; static deflection; model ... See more keywords