A theoretical study of an improved capacitive pressure sensor: Closed-form solution of uniformly loaded annular membranes
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DOI: 10.1016/j.measurement.2017.07.025
Abstract: Abstract In this study, the conductive diaphragm in conventional capacitive pressure sensors with dual function (the deformable element and the upper electrode plate of a non-parallel plate capacitor) was modified into a non-conductive elastic annular… read more here.
Keywords: deformable element; parallel plate; plate; plate capacitor ... See more keywords