Miniature Deformable MEMS Mirrors for Ultrafast Optical Focusing
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DOI: 10.3390/mi14010040
Abstract: Here, we introduce ultrafast tunable MEMS mirrors consisting of a miniature circular mirrored membrane, which can be electrostatically actuated to change the mirror curvature at unprecedented speeds. The central deflection zone is a close approximation… read more here.
Keywords: mems mirrors; optical focusing; membrane; deformable mems ... See more keywords