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Published in 2017 at "IEEE/ASME Transactions on Mechatronics"
DOI: 10.1109/tmech.2016.2639584
Abstract: This paper presents a new damping control scheme for piezo-actuated nanopositioning stages with recursive delayed position feedback (RDPF). The RDPF is proposed to attenuate the resonant mode of the nanopositioning stage in the inner feedback…
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Keywords:
feedback;
position feedback;
delayed position;
piezo actuated ... See more keywords