Sign Up to like & get
recommendations!
1
Published in 2021 at "Materials Chemistry and Physics"
DOI: 10.1016/j.matchemphys.2021.124648
Abstract: This study aims towards a systematic reciprocity of the tunable synthesis parameters - partial pressure of N$_2$ gas, ion energy (\Ei) and Ti interface in TiN thin film samples deposited using ion beam sputtering at…
read more here.
Keywords:
thin films;
highly dense;
dense smooth;
smooth tin ... See more keywords