Size and density controlled Ag nanocluster embedded MOS structure for memory applications
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DOI: 10.1016/j.mssp.2017.01.015
Abstract: Abstract Metal-nanoclusters (NC), deposited by magnetron-based nanocluster source coupled with quadrupole mass filter (QMF) assembly having independent control over their size and density, are used in fabricating NC-based non-volatile memory (NVM) devices. The effect of… read more here.
Keywords: density; size; size density; density controlled ... See more keywords