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Published in 2017 at "Materials Science in Semiconductor Processing"
DOI: 10.1016/j.mssp.2017.01.015
Abstract: Abstract Metal-nanoclusters (NC), deposited by magnetron-based nanocluster source coupled with quadrupole mass filter (QMF) assembly having independent control over their size and density, are used in fabricating NC-based non-volatile memory (NVM) devices. The effect of…
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Keywords:
density;
size;
size density;
density controlled ... See more keywords