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Published in 2021 at "IEEE Transactions on Nanotechnology"
DOI: 10.1109/tnano.2020.3034965
Abstract: As one of the high-precision actuating mechanisms, the piezoelectric actuators show the advantage of micro/nano stage maneuverability in facilitating the actuating performance of the mechanical systems. To improve the actuating accuracy, it is important to…
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Keywords:
rate dependent;
prandtl ishlinskii;
model;
dependent prandtl ... See more keywords