In-situ temperature-dependent sheet resistance study of Cu films in oxygen ambient for heterogeneous integrations
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DOI: 10.1088/1361-6528/ad1d13
Abstract: Controlling and preventing Cu oxidation is crucial for improving the performance and reliability of Cu–Cu bonding. Ni-B films were selectively deposited on Cu films to block the Cu oxidation. The resistivity changes of the Cu… read more here.
Keywords: resistance; resistivity; situ temperature; dependent sheet ... See more keywords